Real world values do not always match up to the values in the documentation. For example, image FOV can vary. The documentation values are best taken as an ideal aspiration to aim for, but various factors (including the environment the camera is in, the distance of the camera from an object, etc) mean that you may never get a perfect result.
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Ok thanks for the help. I just wanted to verify if this could be expected behavior.
I did find that I might have changed some settings after all in the Depth Quality Tool.
The region of interest was set to 40% and the emitter was enabled.
When changing the region to interest to 20% and the emitter was disabled and the camera to target distance was increased to ~60 cm the subpixel RMS did drop below 0.2 pixels.
Even the slightest changes in angle to the target could make a big difference in RMS accuracy.
In some cases the RMS even dropped below 0.1 pixels, without post processing. So it's good to see the RMS ended up being pretty close to the ones reported in the documentation.